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Excimer Lasers: A Comprehensive Overview

The Excimer Laser Technology

An excimer laser is a powerful type of laser that operates in the ultraviolet (UV) spectral region, generating nanosecond pulses.

The Gain Medium

The excimer gain medium consists of a gas mixture containing a noble gas (such as argon, krypton, or xenon) and a halogen (e.g., fluorine or chlorine). The medium is pumped with short current pulses in a high-voltage electric discharge to create excimers – excited dimers that rapidly dissociate after emission to avoid reabsorption.

Emission Wavelengths

Excimer lasers emit at various wavelengths ranging from 157 to 351 nm, depending on the type of excimer gas used.

Pulse Parameters, Beam Quality, and Power Efficiency

Excimer lasers operate in pulsed mode with pulse durations typically in the nanosecond range. They can deliver pulse energies ranging from 10 mJ to 1 J and average output powers from less than 1 W to several hundred watts. The wall-plug efficiency varies between 0.2% and 5%.

Device Lifetime

Early excimer lasers had limited lifetimes due to various factors, but modern advancements have significantly improved their longevity, with lifetimes now limited by ultraviolet optics endurance.

Applications of Excimer Lasers

Excimer lasers find applications in photolithography, laser material processing, laser marking, ophthalmology, psoriasis treatment, and more. They are particularly crucial in semiconductor chip production and laser annealing processes.

Laser Safety

Excimer lasers pose safety risks due to high voltages, handling of poisonous gases, and the potential for skin cancer and eye damage from ultraviolet light exposure.

Excimer Lamps

Excimer lamps operate similarly to excimer lasers but do not contain a laser resonator, emitting diffuse ultraviolet light instead of a focused beam. They are used as ultraviolet light sources in various applications.

Conclusion

Excimer lasers are powerful tools with diverse applications, particularly in industries requiring precise material processing and high-energy light sources. Despite safety considerations, their efficiency and versatility make them indispensable in various fields.

Source: Wikipedia
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